Coatings for microelectronic devices and substrates

U.S. Patent Number: 5290354

Abstract: The present invention relates to a method of forming a ceramic or ceramic-like coating on a substrate, especially electronic devices, as well as the substrate coated thereby. The method comprises coating said substrate with a solution comprising a solvent, hydrogen silsesquioxane resin and a modifying ceramic oxide precursor selected from the group consisting of tantalum oxide precursors, niobium oxide precursors, vanadium oxide precursors, phosphorous oxide precursors and boron oxide precursors. The solvent is then evaporated to thereby deposit a preceramic coating on the substrate. The preceramic coating is then ceramified by heating the to a temperature of between about 40.degree. C. and about 1000.degree. C. This coating, moreover, may be covered by additional passivation and barrier coatings.

Inventors: Haluska; Loren A. (Midland, MI)

Assignee: Dow Corning Corporation (Midland, MI)

Application Number: 07/563,778

Issued: 1994-03-01

Expired: 2006-03-01

Classes: 106/479 ; 106/490; 427/419.1; 427/419.2; 427/419.7; 427/419.8; 427/58; 524/284; 524/356; 524/377; 524/404; 524/405; 524/408; 524/484; 524/490

Field of search: 524/404,405,408,356,377,284,490,484 106/490,479 427/58,419.1,419.2,419.7,419.8 556/450,451

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