Method of forming SI-O containing coatings

U.S. Patent Number: 5320868

Abstract: Disclosed is a method for forming improved Si--O containing coatings on electronic substrate. The method comprises converting hydrogen silsesquioxane resin into a Si--O containing ceramic coating in the presence of hydrogen gas. The resultant coatings have improved properties such as stable dielectric constants.

Inventors: Ballance; David S. (Midland, MI), Michael; Keith W. (Midland, MI)

Assignee: Dow Corning Corporation (Midland, MI)

Application Number: 08/119,634

Issued: 1994-06-14

Expired: 2006-06-14

Classes: 427/228 ; 427/226; 427/387; 428/688

Field of search: 427/226,228,387 428/688

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