Apparatus for forming nanometric features on surfaces

U.S. Patent Number: 5327625

Abstract: An instrument for forming nanometric features on surfaces of materials having a motor driven support for moving a workpiece on an X-Y-Z axis, a scribing tool of nanometric proportion engagable with the workpiece and a laser system for sensing movement. The tool is mounted on piezoelectric actuating means and the entire system is under the control of a programmed computer processing unit.

Inventors: Clark, Jr.; Harry R. (Towsend, MA), Iseler; Gerald W. (Chelmsford, MA), Ahern; Brian S. (Boxboro, MA)

Assignee: Massachusetts Institute of Technology (Cambridge, MA) United States of America (Washington, DC)

Application Number: 07/929,341

Issued: 1994-07-12

Expired: 2006-07-12

Classes: 29/25.01 ; 125/23.01; 257/E21.238; 83/368; 83/74; 83/76.8; 83/76.9; 83/881; 977/856; 977/868

Field of search: 29/25.01 125/23.01 83/881,74,76.8,76.9,368

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