Atomic oxygen reactor having at least one sidearm conduit

U.S. Patent Number: 5332551

Abstract: An apparatus (200) for treating a microporous structure (239) with atomic oxygen. The apparatus (200) includes a main gas chamber (202) for flowing gas in an axial direction and a source (218, 220) of gas, containing atomic oxygen, connected for introducing the gas into the main gas chamber (202). The apparatus (200) employs at least one side arm (228) extending from the main atomic oxygen-containing chamber (202). The side arm (228) has characteristic relaxation times such that a uniform atomic oxygen dose rate is delivered to a specimen (239) positioned transversely in the side arm (228) spaced from the main gas chamber (202).

Inventors: Koontz; Steven L. (League City, TX)

Assignee: The United States of America as represented by the Administrator of the (Washington, DC)

Application Number: 07/997,265

Issued: 1994-07-26

Expired: 2006-07-26

Classes: 422/129 ; 422/186.04; 422/186.15

Field of search: 422/129,186,186.04,186.05,186.06 156/345,643

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