Thin-film edge field emitter device and method of manufacture therefor

U.S. Patent Number: 5382185

Abstract: Thin-film edge field emitter devices are provided which are capable of low voltage operation. The method of manufacture of the devices takes advantage of chemical beam deposition and other thin-film fabrication techniques. Both gated and ungated devices are provided and all of the devices include a plurality of thin-films deposited on the side-wall of a non-flat substrate. The gated emitter devices include alternating conductive and electrically insulating layers, and upper parts of the latter are removed to expose the upper edges of the conductive layers, with a central one of these conductive layers comprising an emitter for emitting electrons. The emitter devices can be inexpensively produced with a high degree of precision and reproducibility without the need for expensive lithographic machines. The devices can be used in field emitter arrays employed as vacuum transistors, vacuum microelectronic analog and digital devices, and modulated or cold electron sources.

Inventors: Gray; Henry F. (Alexandria, VA), Hsu; David S. Y. (Alexandria, VA)

Assignee: The United States of America as represented by the Secretary of the Navy (Washington, DC)

Application Number: 08/040,944

Issued: 1995-01-17

Expired: 2007-01-17

Classes: 445/49 ; 216/11; 313/309; 313/336; 438/20

Field of search: 313/309,336 445/49,50,24 437/228

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