Tilt sensor

U.S. Patent Number: 5669147

Abstract: A tilt sensor comprises at least two elastically deformable electrodes, a ball having conductivity on at least a surface thereof, and a case which is non-conductive on at least an inner surface thereof for sealing therein the electrodes and the ball.

Inventors: Nakajima; Noriaki (Yokohama, JP), Hasegawa; Hiroshi (Tokyo, JP), Goto; Tetsuro (Funabashi, JP)

Assignee: Nikon Corporation (Tokyo, JP)

Application Number: 08/767,714

Issued: 1997-09-23

Expired: 2005-09-23

Classes: 33/334 ; 200/276; 200/61.52; 200/DIG.29; 33/366.11

Field of search: 33/334,366 340/689 200/61.52,52A,61.45R,DIG.29,61.42,61.41,276,277

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