Method of producing coatings on electronic substrates

U.S. Patent Number: 5707681

Abstract: This invention pertains to a method for producing an insoluble coating on a substrate by curing a composition comprising hydrogen silsesquioxane at a temperature of 375.degree. C. or less for a time sufficient to produce a coating having >80% SiH. It has been found that when the hydrogen silsesquioxane resin is cured at a temperature of 375.degree. C. or less that that the insoluble SiH containing coating shows improved film stress.

Inventors: Bremmer; Jeffrey Nicholas (Midland, MI), Liu; Youfan (Midland, MI)

Assignee: Dow Corning Corporation (Midland, MI)

Application Number: 08/798,405

Issued: 1998-01-13

Expired: 2006-01-13

Classes: 427/58 ; 257/E21.262; 427/240; 427/376.2; 427/387

Field of search: 427/58,240,376.2,387

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