Transmission electron microscope with camera system

U.S. Patent Number: 5717207

Abstract: A transmission electron microscope has a camera system that is linked to the optical lens system of the electron microscope by linking the number of electron beam scanning lines of the camera system with the zoom function of the optical lens system. Thus, the number of scanning lines increases as the magnification of the transferred image decreases. Further, the specimen under observation is photographed with a constant number of pixels at all times regardless of the magnification of the transferred image by the optical lens system, thus preventing a reduction in the amount of specimen information.

Inventors: Koguchi; Masanari (Higashi-kurume, JP), Kakibayashi; Hiroshi (Nagareyama, JP), Tanaka; Hiroyuki (Hitachinaka, JP), Isakozawa; Shigeto (Hitachinaka, JP), Kanehori; Keiichi (Sayama, JP), Makishima; Tatsuo (Tokyo, JP), Tsuji; Kazutaka (Hachioji, JP)

Assignee: Hitachi, Ltd. (Tokyo, JP)

Application Number: 08/685,105

Issued: 1998-02-10

Expired: 2006-02-10

Classes: 250/311 ; 250/397

Field of search: 250/311,397

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