Axial flow particle sensor

U.S. Patent Number: 5747671

Abstract: An axial-flow particle sensor has a sensor element and a housing. The outlet of fluid is placed at the opposite side of the inlet of the fluid, throughholes are formed at the circumference of the vibrating portion of the sensor element, and the vibrating portion of the sensor element is placed on the extension of the flow of the fluid so that the fluid entering from the inlet flows through the throughholes and flows out from the outlet. Two or more throughholes may be formed symmetrically with the axis. The throughhole may be formed on a ceramic substrate, or may be a gap between the ceramic substrate and the housing.

Inventors: Hirota; Toshikazu (Nagoya, JP); Shibata; Kazuyoshi (Nagoya, JP); Takeuchi; Yukihisa (Nishikamo-gun, JP)

Assignee: NGK Insulators, Ltd. (JP)

Application Number: 08/726,172

Issued: 1998-05-05

Expired: 2006-05-05

Classes: 73/61.75 ; 310/338; 73/861.21; 73/861.73

Field of search: 73/61.75,861.04,861.18,861.21,861.73,19.03,24.01,24.03,54.41,61.45,61.49,61.79 310/311,323,324,325,328,338,358

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