Voltage-controlled power semiconductor device

U.S. Patent Number: 6208011

Abstract: The present invention provides a power semiconductor device comprising a semiconductor substrate; a voltage-controlled transistor comprising a first electrode formed on the lower surface of the semiconductor substrate, a gate formed on the semiconductor substrate with a gate oxide interpolated in between and a second electrode formed on the semiconductor substrate; and a zener diode formed on the upper surface of the semiconductor substrate so as to be connected between the gate and the second electrode; wherein p-type regions and n-type regions alternately formed between the zener diode and the second electrode on the semiconductor substrate, a plurality of pad electrodes on the semiconductor substrate provided with the alternate p-type regions and n-type regions so as to allow one or not less than two diodes are series connected between the zener diode and the second electrode, and the distance between the adjacent pad electrodes is set so that when the diode is subjected to a current not less than a predetermined value, the respective pad electrodes are fused so that short-circuiting occurs between the adjacent pad electrodes.

Inventors: Yasuda; Yukio (Tokyo, JP)

Assignee: Mitsubishi Denki Kabushiki Kaisha (Tokyo, JP)

Application Number: 09/325,383

Issued: 2001-03-27

Expired: 2005-03-27

Classes: 257/551 ; 257/106; 257/199; 257/481; 257/603; 257/E27.016; 257/E29.198; 257/E29.257

Field of search: 257/106,199,481,551,603,605,355

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